1. Physical design and mask synthesis for directed self-assembly lithography /
Author: Seongbo Shim, Youngsoo Shin.
Library: Center and Library of Islamic Studies in European Languages (Qom)
Subject: Integrated circuits-- Design and construction.,Integrated circuits-- Masks.,Lithography.,Self-assembly (Chemistry),Circuits & components.,Electronic devices & materials.,Integrated circuits-- Design and construction.,Integrated circuits-- Masks.,Lithography.,Nanotechnology.,Precision instruments manufacture.,Self-assembly (Chemistry),Semi-conductors & super-conductors.,TECHNOLOGY & ENGINEERING-- Mechanical.
Classification :
TK7874
